When the processing temperature in a heater should be changed between lots, for example, a foremost substrate in a subsequent lot is transported to a position close to the heater such as a substrate holding part, and is held in standby thereat until adjustment of a processing environment is completed. As such the apparel provides protection from being in close proximity to heated surfaces, while providing improved movement and maintaining an appearance of a typical work shirt. 16 kg mass according to ASTM D1238. A preferred wedge angle from normal to the stud is 3 degrees with an operating range from 1 degree to 10 degrees. A plurality of complaint fingers extend from the base into the chamber. The piezoelectric vibrator includes a base substrate, a lid substrate, a piezoelectric vibrating reed on which an excitation electrode is formed, and external electrodes.