In one aspect, the present invention reduces average power consumption in a distributed processing system by concentrating an overall processing load to the minimum number of processing units required to maintain a defined level of processing redundancy. The dummy flipflop includes: a contact connected to the other first power supply line or the second power supply line; and an interconnect for connecting the second clock terminal with the contact. The protection circuit module may include a serial protection circuit for electrically connecting the unit cells in series and a parallel protection circuit for electrically connecting the unit cells in parallel. As pin distance from each other, the loop stretches. The second positive-working radiation-sensitive resin composition is provided on the substrate to form a second resist layer.