By controlling buried plate doping level and bias condition, different capacitances can be obtained from capacitors on the same chip with the same layout and deep trench process. The body defines an enclosure and includes a body aperture and the lid includes a first lid aperture positioned adjacent to the body aperture when the lid is in the closed position, such that insertion of a padlock shackle through the body aperture and the lid aperture prevents pivoting movement of the lid from the closed position to the open position. The thickness of a web that is positioned along a passline plane between the sensor is measured even when the passline plane is not perpendicular to the beams of the sensors. Further, node connecting patterns are formed on the submount substrate, and connect the bonding patterns such that nodes corresponding to each other provided in the first and second serial arrays are electrically connected to each other.