The invention provides an electro-optical device capable of performing high-quality and high-definition gray-scale display, which can be driven with a low power consumption, and to provide a driving method therefor and an electronic apparatus using the electro-optical device. According to various aspects of the invention, an improved temperature control is provided for a fusing apparatus wherein control is prioritized. The guide extension catheter may include a push member having a proximal portion with a proximal stiffness, a distal portion with a distal stiffness different from the proximal stiffness, and a transition portion disposed between the proximal portion and the distal portion. Further this inventive process allows substantially the entire surface of each wafer carrier to be utilized while maintaining a high quality planarized wafer product, highly desired in the semiconductor industry. The fluorine concentration in the vicinity of the interface with the silicon substrate is preferably 1\xd71019 cm\u22123 or more.