In a method of forming damascene metallization lines on a substrate by electroplating and chemical mechanical polishing, the metal layer thickness profile is shaped in correspondence to the removal rate during the chemical mechanical polishing. For this purpose, a hall destination floor registration device is provided in the elevator hall so that the user who is present in the hall registers hisher destination floor. The method further includes analyzing effects of executing the software component on the virtual machine based on the kernel level events and the application level events.