A system and method for routing power between circuit blocks in an integrated circuit, such as macros and standard cells. The temperature compensation circuit includes a temperature detection circuit that detects the ambient temperature and, in response thereto, generates a temperature signal; and a current source circuit that is connected between a feedback signal input terminal of the feedback differential amplification circuit and the output voltage detection circuit. The anchors for the first and second arrays of fixed drive fingers are arranged to be co-linear in a lateral direction relative to the motion of the mass.