Methods for planarizing layers of a material, such as a dielectric, and interconnect structures formed by the planarization methods. The serial-to-parallel conversion circuit and the delay circuits are each fed with n clocks having different phases, and are composed of delay devices connected in n groups of serially connected delay devices so that the input data is shifted in synchronism with the rising edges of those n clocks. 01% to 10% by volume of the chemical composition; and a diluent in the form of water. When the sleeve coupling is mounted in the partition, the extension sleeve extends beyond the surface of the partition to prevent liquid on the surface of the partition from leaking into the passageway of the sleeve coupling.