An integrated circuit device may have an internal oscillator for generating a system clock, a trimming logic with a trimming register for adjusting an oscillation frequency of the internal oscillator; a serial data receiver, wherein a serial data stream includes a synchronization signal. The method comprises actuating a needle free injector to pressurize a liquid formulation and force the formulation through an orifice in a skin puncture phase followed by injection of the formulation during a delivery phase. 5 to 1 wt % of magnesium, and aluminum as balance. With this arrangement, it is possible to detect a turning angular rate with high accuracy. The second wafer is patterned in the same way as the first wafer to form a second carrying ring and is fitted on the membrane layer in a mirror-inverted manner with respect to the first wafer so that the membrane area is arranged between the first and second carrying rings in a centered manner in the direction perpendicular to the membrane plane.