An electrical power distribution system and a method of implementation are provided. Silicon material is passed through the plasma and heated so as to form a crystalline silicon particle containing hydrogen at a concentration of 11016-11020. Namely, the interconnecting component acts as a passive element or an active element. 6\xd710\u22122, where I is an ion beam current measured outside an ion beam outlet and irradiated from the bar-type ion gun, Lg is a length of the ion beam outlet with respect to a moving direction of the substrate, Ls is a length of the substrate in the moving direction of the substrate, and T is a process time for processing one substrate.