Polarized reticles, photolithography systems utilizing a polarized reticle, and methods of using such a system are disclosed. Prior to calling the sequence, an address specific to the current state is stored in an address register. In the event of malfunction of the molecular pump that generates an abnormally high torque, the buffering members plastically deform and absorb the shock energy caused by the abnormal torque thereby preventing damage to the vacuum vessel. Since each demodulating finger receives all the sample streams, and any sample stream can be selected, the receiver has the flexibility of optimally varying the assignment of demodulating fingers to sample streams. The leg nodes can be capacitively isolated from Pierce-amplifier circuit nodes to improve start-up.