Provided herein is an emissivity-change-free pumping plate kit used in a single wafer chamber. Lightspot images are repeatedly acquired outside the white LED, and then each analyzed to see if the yellow ring still exists on a lightspot. A molded flow tube of a non-conductive material is arranged to receive a flow of the process fluid. The holder operating mechanism maintains contact between the memory member and the terminal section in a state in which the memory holder having the memory member loaded on it has been moved from its position within the holder container to the loadingunloading position. The color is compared to one or more pre-calculated color tiles.