Methods of isolating spaces formed between features in an array during a pitch reduction process and semiconductor device structures having the same. The method may include generating ammonia vapors in a first storage device and storing said generated ammonia vapors in a second storage device. Encrypted data transferred from the BUS1 is decrypted by a first decryption process, and is written to a small-capacity SRAM within the data transfer control device. The application framework includes configurable parameters that determine how the application software unit is generated and operates. The vehicles are adapted to receive a cassette storage platform which in turn receives standard ISO containers. Then, nitrogen is supplied from the membrane system at a reduced rate for a long duration to maintain the reduced oxygen concentration in the enclosed space until the fire is extinguished by oxygen starvation.