To fabricate a semiconductor memory, one or more pairs of first structures are formed over a semiconductor substrate. A second temperature sensor can be provided offset from the first sensor to provide additional measurements to improve accuracy, and a plurality of heat exchange elements with temperature sensors can be used together to determine fluid properties over a large region. 5 gene and the ribonucleotide reductase gene, specifically destroys tumor cells, is hypersensitive to anti-viral agents, and yet is not neurovirulent. Accordingly, the central electronics device can process, route, or otherwise respond to any signal. As a result, the process engineers can more efficiently collaborate to solve process problems or even develop new process techniques. The separated first data modification detection data is compared with the second data modification detection data to detect data modification.