In a method of manufacturing a semiconductor device, an isolation pattern is formed on a substrate. The improved apparatus comprises a cylindrical basket shaped rotating tumbler made from aluminum sheet metal that holds a plurality of golf balls within a sealed casing for surface preparation. In addition, a threshold voltage lowering region is formed in a portion of the semiconductor substrate near a portion of the isolation structure abutting the second transistor in the first active region. The module engages and is electrically commoned with the shell. A gas outlet port releases hydrogen gas produced by a reaction comprising the solid anhydrous chemical hydride, the anhydrous activating agent, and the liquid. The at least one outlet member may be configured such that the outlet opening defines a plurality of cross-sectional areas each corresponding to a predetermined texture pattern.