A calibration substrate for use during calibration of a lithographic apparatus is disclosed. This data may be entered into the PDA electronically via a communication network such as the internet or LAN system or manually via a keyboard. Each account contains contact and billing information for a network information provider. The overlap region may include an aperture-defining spacer layer, andor an impedance element, such as a porous membrane, adapted to distribute at least one fluid across the entire width of the outlet channel to promote reliable fluid mixing. In present invention, the task of transmitting the schedule is dispersed from the BS to both of the BS and RS so that several RS may transmit the schedule items simultaneously and therefore the resource of the system is saved.