A coating solution is sprayed on a rotating wafer held horizontally from a nozzle provided above the wafer while the nozzle is travelling over the wafer from a wafer center to a wafer outer area, thus spirally spraying the coating solution on the wafer. These compounds are useful for the treatment of Demyelinating Diseases and Conditions such as Multiple Sclerosis, Spinal Cord Injury, Traumatic Brain Injury and Stroke. Then bump-formation positions are inspected based on the second bump inspection images, and degrees of crush of bump vertex portions are inspected based on the respective first bump inspection images. The bit depth of each pixel of the reference image of the N bit depth read out from the frame memory is converted into the bit depth larger than the N bit depth by M bits in accordance with the conversion system by a pixel bit depth inverse converter. A material resource engine provides material supply information from the new supply data, the received demand information following product supply rules and priorities. The seal material can be selected to be comparable with a wide variety of gases, liquid coolants and the like.