A projection lens includes three lens groups, arranged as follows from the magnification side: a first lens group of negative refractive power, a second lens group of positive refractive power, and a third lens group of positive refractive power. A first processor among the plural processors transfers information, used by a second processor to perform post-stage processing of the first processor, from a first memory to a second memory. A first metal is deposited substrate, and a metal semiconductor compound layer is formed on the surface of the semiconductor substrate by making the first metal and the semiconductor substrate react each other by a first heat treatment. Each differential delay circuit also includes first and second load transistors coupled in parallel with the respective first and second input transistors.