A system for processing a semiconductor substrate is provided. The segments are fixed perpendicularly along the axis of the core. These bodies may lie in concave surfaces located on the interior of each side of the split cylindrical housing. , hydroxyalkyl groups and carboxyl or carboxylate ester groups, capable of reacting each with the other to form intramolecular andor intermolecular ester linkages in the presence of an acid released from the radiation-sensitive acid generating agent to cause insolubilization of the resinous ingredient in an aqueous alkaline developer solution. A data transfer component may use the dataset structure to transfer data between the service components. A plurality of moveable counterweights are mounted upon the support structure with each counterweight opposite from and connected to a corresponding one of the jaws.