A system and method for determining the temperature of a semiconductor wafer at the time of thermal contact of the semiconductor wafer with a temperature sensing element. The two light sources and the compound reflector rotates in unison with each other to produce flashes of illumination to a person observing the beacon from a remote location to the beacon. The set of target objects is dynamically variable. The upper ground electrodes and, preferably, also the upper hot electrode, are narrower in width than the corresponding lower electrodes, which helps to provide good velocity matching, good impedance values, and low electrical losses. A stand-alone RTC circuit is also provided, the stand-alone RTC circuit including an RTC clock circuit operating independent of the primary clock circuit. The method includes the steps of: preparing a multi-layered substrate; forming a compression stress layer on a part of a surface of the semiconductor layer; forming a trench in the semiconductor layer; and releasing the movable electrode from the substrate by removing the insulation film.