A semiconductor package integrated with conformal shield and antenna is provided. The automatic controller is electrically connected with a rotating table, a first automatic loading mechanism, an automatic filter disc-sucking mechanism, a second automatic loading mechanism, and an automatic unloading mechanism. In addition, since the light source driving circuit section and the surface light emitting section can be disposed in a position close to a hinge section altogether, the center of gravity of an FAU is moved to the hinge section side, and rotatability of the hinge section becomes easy and is improved. Relative scanning movement between the sample and the probe may be provided, and, in one mode of operation, a feedback signal is generated based on the measured potential. The pivot also helps in retracting the hammer from the concrete to unjam it therefrom particularly when the concrete is moving relative to the hammer.