A method and apparatus for shielding a device, such as a pump, from a process chamber of a semiconductor wafer processing system. The method continues with the DS processing module determining failure mode information for the storage server and other storage servers and determining a rebuilding protocol for the encoded data. The SCA generator also includes a matching module configured to match a service identifier received with the input instructions to service metadata stored in the Metadata repository and a retrieving module configured to retrieve service parameters for the matched service. When the response information corresponding to the supervisory control request from the supervisory control terminal exists as cache information in the cache storage unit, the cache management unit transmits the cache information to the supervisory control terminal. A write operation, a write verify operation, and a data circuit content updating operation based on the contents of the data circuits are repeatedly performed until the memory cells are set in predetermined written states.