A performance of a telecommunication feature for a telecommunication customer is monitored. A plurality of display faces are displayed on each card, and additional faces are stored for simultaneous play. , an organopolysiloxane containing, on the average, at least 2 SiH radicals and having a viscosity of 1-100,000 mPa\xb7s at 25\xb0 C. The insufflation valve is positionable between an open position and a closed position such that when the insufflation valve is located in the open position an insufflation gas can be advanced into the working channel and when the insufflation valve is located in the closed position the insufflation gas is prevented from being advanced into the working channel. Therefore, the intermediate product is not exhausted from the processing chamber 12 excessively, and hence the etching efficiency is high.