1460469177-2d935f11-05cc-4c80-a020-7012b49a24dd

Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In various embodiments, a monitoring module and a managing module are employed cooperating with each other to authorize users in booting up the computing system from peripheral devices. The antenna receives an RF signal in a predetermined frequency band.