A meso-scale MEMS device having a movable member is formed using standard printed wiring board and high density interconnect technologies and practices. A torque value deviation absolute value is calculated using the absolute value of a difference between the torque value from the previous processing and the torque value from the current processing, and is stored in a ring buffer. Upon receiving a show|compare command or a commit command, the management module generates a configuration patch that is a textual representation of any differences between the working copy and the initial data source. A fill opening formed in the top wall enables introduction of liquid fluid into the liquid fluid-holding reservoir.