1460472180-dcb10088-69d6-4d62-a017-734a155f26b9

An imager with a four color mosaic pattern of red, green, blue, and infrared pass filters, where color component signals for a pixel are interpolated by averaging over nearest neighbor pixels. The input polynomial is classified as a constant, a univariate polynomial, or a multivariate polynomial. A network is provided to establish peer-to-peer communication among the heaters’ controllers. The abatement process in specific embodiments facilitates high efficiency abatement of effluents from copper deposition processes utilizing CuTMVS as a copper source reagent.