A transport scheme is provided based on Internet protocol and multiprotocol label switching technology for third generation radio access networks. The peripheral devices are coupled to a scan path. The exposure device includes a liquid removing mechanism 40 which removes the liquid remaining on a part 7 arranged in the vicinity of the image plane of the projection optical system. The selected policy is applied to resolve the conflict and to produce a resulting data value for the integrated data. The electrodes are made of a nonporous carbon having crystallites of graphite-like carbon. An error signal is generated when the motion quantity measured on the driven side varies from the dynamic model.