Methods, software and devices for searching and indexing information are disclosed. The treatment container constituting a chamber or a bell jar has a portion of the inner surface to be exposed to corrosive halide gas plasma and is formed with a sintered body mainly composed of a compound of yttrium and aluminum with oxygen, and the portion has a roughened surface of a mean roughness Ra of 1. The driver and the driver supportfastener-positioning unit are controlled by an electropneumatic system.