A semiconductor device, having a memory cell region and a peripheral circuit region, includes an insulating film, having an upper surface, formed on a major surface of a semiconductor substrate to extend from the memory cell region to the peripheral circuit region. In each aspect, a representation of at least a portion of the original matrix is projected into a lower dimensional subspace and those portions of the subspace representation that relate to the term of the query are weighted following the projection into the lower dimensional subspace. The line sensor comprises a pair of one-dimensional CCD image sensors. Each measurement module has an IC chip for processing positional information and measured values to generate relevant signals, and a tester antenna for receiving and transmitting the signals from the IC chip.