A retreat permission position of a carrier arm when the carrier arm is moved back to retreat outside a mounting table after the carrier arm carries a substrate to a position above the mounting table while holding a peripheral portion of the substrate, to thereby place the substrate on a plurality of supporting pins vertically movable through the mounting table. Configuration information of the computer is wirelessly sent to a remote server. The face insert has a boundary face between the at least one low hardness portion and the at least one high hardness portion which is inclined relative to a back-to-forth direction of the putter head. First and second edges of the at least one section adjacent the notch are folded inward relative an inner surface of the at least one section forming first and second sides.