A semiconductor device includes a superlattice that, in turn, includes a plurality of stacked groups of layers. The pharmaceutical compositions comprising an effective amount of compounds of formula I, and methods for the treatment of Parkinson’s disease may be formulated for oral, buccal, rectal, topical, transdermal, transmucosal, intravenous, parenteral administration, syrup, or injection. The file provides for sequential rotation of a selected angle in a forward direction followed by rotation of a slightly less angle in a reverse direction.