A substrate stage is used in a lithographic apparatus. A management console is also connected to the storage system. The typical cell described uses the \u201cChannel Accelerated Carrier Tunneling method for programming memories\u201d for accumulating one type of carriers in the floating gate, and another method, the Tunnel Gun method, for accumulating the other type of carriers in the floating gate of the cells. The second light beam has a wavelength different from the first light beam.