The invention relates to a novel CMP slurry composition used for polishing metals, the composition comprising: a dispersion solution comprising an abrasive; and an oxidizer. FODO cells contain focus magnets and defocus magnets that are specified by a number of parameters. wherein X is an alkyl with a carbon number of 2, and Y is an alkenyl. The biasing member is secured to the base plate, and is disposed adjacent to the second lens surface of the beam splitting lens for urging the beam splitting lens toward the supporting wall such that the first lens surface of the beam splitting lens abuts against the first wall surface of the supporting wall. The detecting unit is connected to the first and second termination circuits, and detects an IP address and a first message from first data as the data transmitted from one of the first and second communication terminal, and a second message from second data as the data transmitted from the other. The control assembly is for adjusting a focal point of the optical imaging system responsive to the sensor output signal.