1460504738-382d6de5-924c-4da9-8626-cfa9c5d2f609

A method of removing a photoresist layer on a semiconductor wafer starts with placing the semiconductor wafer into a dry strip chamber. The curvature of the trowelling bar is controlled by the rotation of a cam that is positioned on a rigid support and that is directly coupled to the trowelling bar through a link. The control also employs a closed loop control effort responsive to at least one preselected transmission speed error.