Disclosed is an electrostatic chuck comprising a ceramic dielectric layer having a surface for placing thereon a work that is to be held, and an electrode provided on a surface opposite to the surface of the ceramic dielectric layer for placing the work thereon, wherein:. The burner includes a burner tube having an upstream end, a downstream end and a venturi intermediate said upstream and downstream ends, the venturi including a throat portion having substantially constant internal cross-sectional dimensions such that the ratio of the length to maximum internal cross-sectional dimension of the throat portion is at least 3. The first recommend user group list is updated to include the selected third users.