The present invention relates to intermediates of the formulawherein G1 is N; G2 is selected from the group consisting of C\u2550O and CH2; X is a halogen; and the other groups are defined herein. The take-up mechanism includes a gear, a motor configured for engagement with the gear, and a manual input shaft configured for engagement with the gear. From these layers, the gate electrodes in the memory region are formed, the source and drain regions are implanted and the memory region is covered in a planarizing manner with an insulation material.