A prediction method for a substrate processing apparatus is to predict processing results from operation data on the substrate processing apparatus during a procedure for processing a target processing substrate in a processing chamber of the substrate processing apparatus. An underfill material is applied to a portion of the electrical substrate, and the underfill material is heated to an underfill-material staging temperature. As a result, re-processing of the data item is held until the lock obtained by the failed transaction is released and this is only done once compensation of non-transactional work is complete. According to the present invention, an electro-optical device is provided at an increased production yield with a reduced production cost. The first motor is operatively coupled to the wheel assembly and is capable of rotating the pair of toothed wheels. According to the present invention, a cell-specific downlink-uplink setting for one of a plurality of serving cells and a reference UL-DL setting is received, an effective downlink sub-frame capable of actually receiving a data unit from one serving cell is determined based on the settings, and only an ACKNACK for the effective downlink sub-frame is configured as a bit string and fed back.