A mask unit for depositing a thin layer in a display device. The optical fiber can deliver light for total internal reflection microscopy. The visible or infrared energy can be applied using a laser probe. Lateral epitaxial growth is used to effectively inhibit the stacking faults and reduce the thread dislocation density in the semiconductor structure to improve the crystallization quality of the light-emitting layer and reduce leakage current. The present invention particularly relates to the soybean variety S06-CL959411 and its progeny, and methods of making S06-CL959411.