An anti-microbial touch panel includes a substrate; an active portion on one surface of the substrate; and a homeotropic organosilane layer deposited on the active portion for reducing survivability of microorganisms contacting the touch panel. in the form of free acid in an amount of 10\u201340 mass % and inorganic salt in an amount of 1. In an alternate embodiment, a dielectric layer is deposited on a first semiconductor layer, and is patterned and etched to define dielectric strips.