1460527626-b02abdb6-77df-46ad-9e8b-a88e29293951

An elevated containment structure in the shape of a wafer edge ring surrounding a surface of a semiconductor wafer is disclosed, as well as methods of forming and using such a structure. A rotary transformer is interposed between a transmission side circuit and a reception side circuit. The controller has a battery set electrically coupled to the power input device for providing the necessary working power to the power input device.