Disclosed is a ruthenium film-forming material having a lower melting point and a higher vapor pressure that facilitates supply of the material onto a base and moreover enables a high-quality ruthenium film to be obtained. Also disclosed is a chemical sealing solution for sealing the surface coating formed by anodizing an aluminum or aluminum alloy substrate, the solution being a dilute solution of a rare earth metal salt selected from the group consisting of cerium salts and yttrium salts. In the locking period, the DLL circuit utilizes the delay time of the delay units, which is decided in the evaluation period, along with the voltage control delay circuit, to lock phase of the reference clock signal. Furthermore, a seal is provided to isolate the valve actuating rod and the outside environment from the process. A controlleroptimizer operates on the combination of the application workflows to compute production strategies and actions.