The invention relates to a device for X-ray analysis with energy dispersive detection of fluorescent radiation. The capacitive devices are adaptable to a wide range of electrode dimensions and electrode stack heights. A channel stopping region with a P-type dopant is formed to a first side of the trench to completely contain an N-type source junction therein. higher than the melting point,|\u2208r2\u2212\u2208r1|\u2208r1\xd7100\u22665\u2003\u2003where \u2208r1 denotes the relative dielectric constant before the heating, \u2208r2 denotes the relative dielectric constant after the heating.