Problems It is to provide a method for producing a silicon oxide film having better quality than a TEOS at low temperature. During a period from when the detecting unit detects the forward edge of the sheet until the detecting unit detects the rear edge, the sheet is decelerated from a first conveying speed to a second conveying speed. At least one compression ring is positioned within the ferrule for sealingly engaging the interior surface, the compression ring also having an aperture therethrough for receiving the electrical lead. Each image capture device has a sensor for capturing an image and an event channel providing an event signal indicating the capturing of an image by the sensor. The fastening employs screws that pass through mating sets of holes in the legs and adjacent housing portions, which are then tightened with nuts. The fine TCR calibration slot has a depth selected to obtain a TCR value observed at the voltage sense terminals that approaches zero.