Based on the information about the capability of a first exposure apparatus of correcting the distortion of a first mask transferred a wafer, the image forming characteristics of a second exposure apparatus is adjusted. Pivoting connections between a distal frame portion and a proximal frame portion are actuated by EAP fiber actuators and thereafter are locked at the selected articulation angle by deactivating an EAP lock release. The sterile package consists of a housing for the syringe barrel, which can telescope into a larger diameter hollow cap covering the syringe plunger. The operating mechanism includes a first stopper prohibiting movement of the operating mechanism from the LOCK position and a second stopper prohibiting movement of the operating mechanism to the LOCK position. The IO bus manager initializes an IO bus and then informs a CPU in the computer of the IO bus fault as an interruption to be processed by an OS operated by the CPU, whereby the OS can acquire the fault information after the interruption even in the case where an IO bus fault occurs.