Sterically stabilized second-order nonlinear optical chromophores and devices incorporating the same are embodied in a variety of chromophore materials. A pillar protruding out of a surface of the substrate is already formed on the substrate, and a patterned layer is already formed on the pillar. After removing the photoresist layer, performing a thermal oxidation process to form a thick gate oxide layer in the doping region and a thin gate oxide layer in the undoping region.