1460644538-5bd05fa0-b29c-4493-a8ef-8f1a66d9de41

A pad conditioning system for conditioning a polishing pad in conjunction with a workpiece polishing operation includes a pad conditioning head coupled with a positioning unit. The cushion has a rear cushion panel and the inflator may have a front inflator plate attached to the rear cushion panel. An electromagnetic drive is arranged in the housing.