A multi-process interactive system is described. The useful intermediates are also disclosed. The pair of the focus coils is disposed on the both sides of the tracking coil in the direction of the longer side of the substrate. Lastly, the source-handle-structure is annealed at a second energy level that is lower than the first energy level at least until the substrate detaches at the predetermined detachment area. The PBS, positioned between the wavelength-selective retarder device and the first and second LVs, directs the first and second dark-state lights to the first and second LVs respectively, and also directs the first and second bright-state lights to a screen. A sensor is arranged to sense an amount of the air within the induction device.