The invention is related to a boride of a metal of transition group four of the periodic table of the elements, wherein at least 40 wt. The vibrational energy or acoustic pressure waves may be created by a transducer where the waves are transferred to the stencil or printable material through air or a vibrational interface medium. Each fin extends out from one of the thermal plates into the array and is interleaved with the cells to cool or heat the cells. Thus, occurence of undercut of the resin, which forms an interlayer insulating resin layer, can be prevented and the reliability of the connection of the via holes can be improved.