A lithographic apparatus includes an illumination system constructed and arranged to condition a radiation beam, and a support constructed and arranged to support a patterning device. Compounds according to the invention bind to and are agonists, antagonists or inverse agonists of the CB2 receptor, and are useful for treating inflammation. In one embodiment, the plate member has a slot near one end and an aperture at another end. Based on values in the stencil buffer 16, a shadow of the character object cast on the land object is rendered. Thus, a plurality of such fastening members are coupled. The arsine continues to flow through the CVD apparatus to the adsorber where it is adsorbed by the resin contained therein.