A process tool controller of a semiconductor processing tool is provided with software that enables collecting, monitoring and logging information regarding the tool’s consumption. The gas decomposition reactor includes a reactor vessel, a Raman spectrometer, and a processor. The cooking oven comprises at least one top heating element arranged in an upper portion of the oven cavity and below the top wall of said oven cavity and at least one rear heating element arranged in a rear portion of the oven cavity and in front of the rear wall of said oven cavity. The second LED emits light at a third wavelength that is greater than the first wavelength.