Provided are an energy storage device including an electrode in which lithium is introduced into a silicon layer and a method for manufacturing the energy storage device. The manufacturing method removes the damaged compound particles from the substrate surface without producing significant amount of new damaged compound particles in the substrate surface. A high-speed tension adjustor can rapidly adjust the entry tension of the metal strip to compensate for the detected self-excited third octave vibration. The band information may be recorded and used to facilitate handling of a similar type of pallet in future operations to eliminate any stoppage for determination of retooling or adjustment. The bottom contact portion is provided with a connection portion to which the plunger is connected.